Energy Filtered EBSD

Available for SEM and UHV chambers

Electron Back Scattered Diffraction can now be upgraded with an Imaging Energy Filter that selects an adjustable energy range.

• Drastically improves the contrast of diagrams
• Raw data already reveals detailed structure information
• Explores the energy dependence of scattering
• Performs Energy Loss measurements (ELS)
• Fast Acquisition (CCD) with adjustable shutter speed

Unfiltered Diagram

Filtered Diagram

Images courtesy of A. Deal and A. Eades of Lehigh University

Filter Unit assembled for a SEM chamber. The same unit is available with a standard CF flange.

Patented Design of the imaging filter.

Accessories

• Data acquisition system
• UHV SEM electron sources
• Computer controls
• Ion source for cleaning